US8968052B2 - Systems and methods of wafer grinding ...
US8968052B2 US13/656,514 US201213656514A US8968052B2 US 8968052 B2 US8968052 B2 US 8968052B2 US 201213656514 A US201213656514 A US 201213656514A US 8968052 B2 US8968052 B2 US 8968052B2 Authority US United States Prior art keywords grind spindle wafer rotary indexer work Prior art date Legal status (The legal status is an assumption and is not a legal conclusion.