Hybrid micromachining of glass using ECDM and micro grinding
12%Micro electrochemical discharge machining (ECDM) is a well-known machining process that achieves 3D micro structures in glasstype material. However, a rough surface is the main disadvantage of this process. In the present work, a hybrid process of ECDM and micro grinding using polycrystalline diamond (PCD)tools is investigated. Micro structures in glass …